Aerospace Engineering and Medical Sputtering Solutions
High-end sputtering process for optical films used in aerospace engineering and medical/bio applications is possible!
The "TFE BH/BV Batch Type Sputtering Series" offers a vertical transport method with extremely low particle deposition on substrates and a horizontal transport method with excellent maintenance capabilities. It achieves precise control of film thickness through high-speed scanning of substrates directly beneath each cathode, providing a sputtering solution for aerospace engineering and medical applications, all while maintaining an inline approach. Additionally, it allows for the selection of high-rate DC magnetrons for metals, RF magnetrons for oxides, and dual-cathode AC sputtering, enabling high-throughput production of high-end functional films. This is highly recommended for engineers seeking high-throughput film deposition using high-end batch equipment. 【Features】 ■ Good film thickness distribution through the swinging of the substrate holder (palette) ■ Cleaning process enabled by an RF etching chamber ■ Expandability of the sputtering process with DC substrate bias (optional) *For more details, please feel free to contact us.
- Company：プラズマ・サーモ・ジャパン
- Price：Other
